规格类型 100 AMU SPS 200 AMU SPS 300 AMU SPS分辨率 1 amu wide @ 10% peak height 1 amu wide @ 10% peak height 1 amu wide @ 10% peak height总压力范围¹ 5E-7 to 1E-3 Torr (6.6E-7 to 1.3E-3 mbar) 5E-7 to 1E-3 Torr (6.6E-7 to 1.3E-3 mbar) 5E-7 to 1E-3 Torr (6.6E-7 to 1.3E-3 mbar)总压力精度² ±25% 1E-6 to 1E-3 Torr (1.3E-6 to 1.3E-3 mbar) ±25% 1E-6 to 1E-3 Torr (1.3E-6 to 1.3E-3 mbar) ±25% 1E-6 to 1E-3 Torr (1.3E-6 to 1.3E-3 mbar)**离子源工作压力³ 1E-3 Torr (1.3E-3
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